Sputtering Tool System

PLEASE NOTE: AN ADDENDUM HAS BEEN INCORPORATED INTO THIS SOLICITATION AS OF 9/23/2025. PLEASE INCLUDE A SIGNED COPY OF THE ADDENDUM WITH THE PROPOSAL. 

Argonne National Laboratory is seeking a provider of a sputtering system handling multiple substrates sizes from 150mm to wafer pieces for support of our users and staff scientists. 

Please review first the Instructions for Offerors, and then the ANL-70 Request for Quotation for the required documentation. 

The following documents must be returned and fully executed by a person authorized to legally bind the Offeror.
-    Reps and Certs – ANL-70B form
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