Autonomous Sputtering Tool – Main Chamber

Posted Date: Jun 24, 2025
Jul 03, 2025
Awarded Date: No Awarded Date
SetAside Type
Solicitation ID Solicitation Title Solicitation Office
RFQ_2025025165 Autonomous Sputtering Tool – Main Chamber
Synopsis

It is the intent of NREL to award one (1) Purchase Order under this solicitation for a Autonomous Sputtering Tool – Main Chamber as specified in the Technical Specifications – Attachment No. 1. The objective of this purchase is to enable Autonomous Experimentation (AE) synthesis of nitride and oxide materials to support the Minerals to Materials Supply Chain Research Facility (METALLIC), as part of an autonomous semiconductor development facility at NREL.

Amendment 1 - posted 6/24/25: Q&A's.

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Office Location Agency Name Solicitation Base Posting Type
ENERGY, DEPARTMENT OF Combined Synopsis/Solicitation
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